Search results for: Jerke, John M.
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Interlaboratory study on linewidth measurements for antireflective chromium photomasks
Authors: Jerke, John M.
Published: U.S. Department of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.p.O., 1982Physical Description: vii, 183 pages : illustrations ; 28 cm.Holdings: Loading…
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Accurate linewidth measurements on integrated-circuit photomasks
Authors: Jerke, John M.Other Authors: “…Jerke, John M.…”
Published: U.S. Dept. of Commerce, National Institute of Standards and Technology, 1980
Physical Description: 1 online resource.Holdings: Loading…Connect to online resource - All users (Federal Depository Library Program Persistant URL)
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3
Interlaboratory study on linewidth measurements for antireflective chromium photomasks
Authors: Jerke, John M.Other Authors:
Published: U.S. Dept. of Commerce, National Institute of Standards and Technology, 1982Physical Description: 1 online resource.Holdings: Loading…Connect to online resource - All users (Federal Depository Library Program Persistant URL)
Government Document Electronic eBook