Search results for: Levinson, Harry J.

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  1. 1
  2. 2

    Extreme ultraviolet lithography

    Authors: Levinson, Harry J.
    Published: SPIE Press, 2020
    SPIE Digital Library - eBooks: 2020 (Digital Object Identifier Permalink)
    Electronic eBook
  3. 3

    Lithography process control

    Authors: Levinson, Harry J.
    Published: SPIE Optical Engineering Press, 1999
    SPIE Digital Library - eBooks: 1999 (Digital Object Identifier Permalink)
    Electronic eBook
  4. 4

    Principles of lithography

    Authors: Levinson, Harry J.
    Published: SPIE Press, 2005
    SPIE Digital Library - eBooks: 2005 (Digital Object Identifier Permalink)
    Electronic eBook
  5. 5

    Principles of lithography

    Authors: Levinson, Harry J.
    Published: SPIE Press, 2010
    SPIE Digital Library - eBooks: 2011 (Digital Object Identifier Permalink)
    Electronic eBook