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|a 621.381/74
|2 19
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| 090 |
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|a TR940 .O69 1984
|
| 245 |
0 |
0 |
|a Optical microlithography III :
|b technology for the next decade : March 14-15, 1984, Santa Clara, California /
|c Harry L. Stover, chairman/editor.
|
| 260 |
|
|
|a Bellingham, Wash., USA :
|b SPIE--the International Society for Optical Engineering,
|c [1984], ©1984.
|
| 300 |
|
|
|a vi, 269 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 470
|
| 504 |
|
|
|a Includes bibliographies and index.
|
| 650 |
|
0 |
|a Photolithography
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh85101379
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008104263
|
| 700 |
1 |
|
|a Stover, Harry L.
|0 http://id.loc.gov/authorities/names/n82148501
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|0 http://id.loc.gov/authorities/names/n78088934
|
| 740 |
0 |
|
|a Optical microlithography 3.
|
| 740 |
0 |
|
|a Optical microlithography three.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 470.
|0 http://id.loc.gov/authorities/names/n42030541
|
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|p Can Circulate
|a Michigan State University-Library of Michigan
|b Michigan State University
|c MSU Remote Storage
|d MSU Remote Storage
|t 0
|e TR940 .O69 1984
|h Library of Congress classification
|i Printed Material
|m 31293004854471
|n 1
|
