APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers & Stover, H. L. (1983). Optical microlithography II: Technology for the 1980s : March 16-17, 1983, Santa Clara, California. SPIE--the International Society for Optical Engineering.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Harry L. Stover. Optical Microlithography II: Technology for the 1980s : March 16-17, 1983, Santa Clara, California. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1983.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers and Harry L. Stover. Optical Microlithography II: Technology for the 1980s : March 16-17, 1983, Santa Clara, California. SPIE--the International Society for Optical Engineering, 1983.