Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
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Other Authors: | |
Language: | English |
Published: |
Washington, D.C. :
The Society,
1983.
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Series: | ACS symposium series ;
219. |
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Physical Description: | ix, 363 pages : illustrations ; 24 cm. |
Format: | Book |
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