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00000cam a2200000 a 4500 |
| 001 |
in00000574129 |
| 003 |
OCoLC |
| 005 |
20220616085146.0 |
| 008 |
830307s1983 dcua b 101 0 eng |
| 010 |
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|a 83005968
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| 020 |
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|a 0841207755
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| 035 |
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|a (OCoLC)9371344
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| 039 |
0 |
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|a 2
|b 3
|c 3
|d 3
|e 3
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| 040 |
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|a DLC
|c DLC
|d EEM
|d UtOrBLW
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| 049 |
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|a EEMC[c.1]
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| 050 |
0 |
0 |
|a TR940
|b .I57 1983
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| 082 |
0 |
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|a 686.2/315
|2 19
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| 090 |
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|a TR940 .I57 1983
|
| 245 |
0 |
0 |
|a Introduction to microlithography :
|b theory, materials, and processing /
|c L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
|
| 260 |
|
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|a Washington, D.C. :
|b The Society,
|c 1983.
|
| 300 |
|
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|a ix, 363 pages :
|b illustrations ;
|c 24 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a ACS symposium series,
|x 0097-6156 ;
|v 219
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Photolithography
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh85101379
|
| 650 |
|
0 |
|a Photoresists
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2010106194
|
| 700 |
1 |
|
|a Thompson, L. F.,
|d 1944-
|0 http://id.loc.gov/authorities/names/n83040713
|
| 700 |
1 |
|
|a Willson, C. G.
|q (C. Grant),
|d 1939-
|0 http://id.loc.gov/authorities/names/n83040714
|
| 700 |
1 |
|
|a Bowden, M. J.,
|d 1943-
|0 http://id.loc.gov/authorities/names/n83040715
|
| 710 |
2 |
|
|a American Chemical Society.
|b Division of Organic Coatings and Plastics Chemistry.
|0 http://id.loc.gov/authorities/names/n83162446
|
| 710 |
2 |
|
|a American Chemical Society.
|b Meeting
|n (185th :
|d 1983 :
|c Seattle, Wash.)
|0 http://id.loc.gov/authorities/names/n82068252
|
| 830 |
|
0 |
|a ACS symposium series ;
|v 219.
|0 http://id.loc.gov/authorities/names/n42001050
|
| 907 |
|
|
|y .b15128659
|b 211202
|c 980609
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|s 6a49d32b-972b-533e-a090-9eb15898fa48
|t 0
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| 952 |
f |
f |
|p Can Circulate
|a Michigan State University-Library of Michigan
|b Michigan State University
|c MSU Remote Storage
|d MSU Remote Storage
|t 0
|e TR940 .I57 1983
|h Library of Congress classification
|i Printed Material
|m 31293001487598
|n 1
|
