Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor.
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Other Authors: | |
Language: | English |
Published: |
Bellingham, Wash. :
SPIE--the International Society for Optical Engineering,
[1982], ©1982.
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Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 334. |
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Physical Description: | viii, 265 pages : illustrations ; 28 cm. |
Format: | Book |
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