Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman/editor.
| Uniform Title: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 334. |
|---|---|
| Corporate Author: | |
| Other Authors: | |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE--the International Society for Optical Engineering,
[1982], ©1982.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 334. |
| Subjects: | |
| Genre: | |
| Physical Description: | viii, 265 pages : illustrations ; 28 cm. |
| Format: | Book |