The capabilities and limitations of auger sputter profiling for studies of semiconductors / S.A. Schwarz [and others] ; sponsored by the Defense Advanced Research Projects Agency.

Bibliographic Details
Uniform Title:	NBS special publication ; 400-67. Semiconductor measurement technology.
Corporate Authors:	United States. Defense Advanced Research Projects Agency United States. National Bureau of Standards
Other Authors:	Schwarz, S. A.
Language:	English
Published:	Washington, D.C. : U.S. Department of Commerce, National Bureau of Standards, 1981.
Series:	NBS special publication ; 400-67. Semiconductor measurement technology.
Subjects:	Sputtering (Physics) Metal oxide semiconductors. Semiconductors.
Physical Description:	vi, 46 pages : illustrations ; 26 cm.
Format:	Government Document Microfilm Book

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