APA (7th ed.) Citation

Thompson, L. F., Willson, C. G., & Bowden, M. J. (1994). Introduction to microlithography (Second edition.). American Chemical Society.

Chicago Style (17th ed.) Citation

Thompson, L. F., C. G. Willson, and M. J. Bowden. Introduction to Microlithography. Second edition. Washington, DC: American Chemical Society, 1994.

MLA (9th ed.) Citation

Thompson, L. F., et al. Introduction to Microlithography. Second edition. American Chemical Society, 1994.