Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
Uniform Title: | ACS professional reference book.
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Other Authors: |
Thompson, L. F., 1944- Willson, C. G. (C. Grant), 1939- Bowden, M. J., 1943- |
Language: | English |
Published: |
Washington, DC :
American Chemical Society,
1994.
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Edition: | Second edition. |
Series: | ACS professional reference book.
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Subjects: | |
Genre: | |
Physical Description: | xiv, 527 pages : illustrations ; 24 cm. |
Format: | Book |