Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.

Bibliographic Details
Uniform Title:ACS professional reference book.
Other Authors: Thompson, L. F., 1944-
Willson, C. G. (C. Grant), 1939-
Bowden, M. J., 1943-
Language:English
Published: Washington, DC : American Chemical Society, 1994.
Edition:Second edition.
Series:ACS professional reference book.
Subjects:
Microlithography > Congresses.
Photoresists > Congresses.
Plasma etching > Congresses.
Semiconductors > Etching > Congresses.
Genre:
Congresses.
Physical Description:xiv, 527 pages : illustrations ; 24 cm.
Format: Book
Contents:
  • An introduction to lithography / Larry F. Thompson
  • The lithographic process / Murrae J. Bowden
  • Organic resist materials / C. Grant Willson
  • Resist processing / Larry Thompson
  • Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.