Methods and materials in microelectronic technology [electronic resource] / edited by Joachim Bargon.

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Bibliographic Details
Corporate Author: International Symposium on Methods and Materials in Microelectronic Technology Bad Neuenahr-Ahrweiler, Germany
Other Authors: Bargon, Joachim
Language:English
Published: New York : Plenum Press, c1984.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Photolithography > Congresses.
Ion beam lithography > Congresses.
X-ray lithography > Congresses.
Online Access:
Springer Book Archive - Chemistry & Material Science: 1984 (Springer Link)
Format: Electronic Conference Proceeding eBook
Description
Note:"Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso.
Bibliography Note:Includes bibliographies and index.
ISBN:9781468448474 (online)