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840613s1984 nyua ob 001 0 eng |
| 020 |
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|z 9780306418037
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| 020 |
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|z 9781468448498
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| 020 |
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|a 9781468448474 (online)
|
| 035 |
|
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|a (EBZ)ebs1870941e
|
| 040 |
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|a DLC
|d EBZ
|
| 042 |
|
|
|a msc
|
| 050 |
0 |
0 |
|a TK7874
|b .I5924 1982
|
| 111 |
2 |
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|a International Symposium on Methods and Materials in Microelectronic Technology
|d (1982 :
|c Bad Neuenahr-Ahrweiler, Germany)
|
| 245 |
1 |
0 |
|a Methods and materials in microelectronic technology
|h [electronic resource] /
|c edited by Joachim Bargon.
|
| 260 |
|
|
|a New York :
|b Plenum Press,
|c c1984.
|
| 500 |
|
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|a "Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso.
|
| 504 |
|
|
|a Includes bibliographies and index.
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration
|x Design and construction
|x Congresses.
|
| 650 |
|
0 |
|a Photolithography
|x Congresses.
|
| 650 |
|
0 |
|a Ion beam lithography
|x Congresses.
|
| 650 |
|
0 |
|a X-ray lithography
|x Congresses.
|
| 700 |
1 |
|
|a Bargon, Joachim.
|
| 773 |
0 |
|
|t Springer Book Archive - Chemistry & Material Science
|d Springer Nature
|
| 776 |
1 |
|
|t Methods and materials in microelectronic technology /
|w (DLC)84013352
|
| 856 |
4 |
0 |
|y Access Content Online(from Springer Book Archive - Chemistry & Material Science)
|u https://ezproxy.msu.edu/login?url=https://link.springer.com/10.1007/978-1-4684-4847-4
|z Springer Book Archive - Chemistry & Material Science: 1984
|
