Levinson, H. J. (2020). Extreme ultraviolet lithography. SPIE Press. https://doi.org/10.1117/3.2581446
Chicago Style (17th ed.) CitationLevinson, Harry J. Extreme Ultraviolet Lithography. Bellingham, Washington: SPIE Press, 2020. https://doi.org/10.1117/3.2581446.
MLA (9th ed.) CitationLevinson, Harry J. Extreme Ultraviolet Lithography. SPIE Press, 2020. https://doi.org/10.1117/3.2581446.
Warning: These citations may not always be 100% accurate.