APA (7th ed.) Citation

Levinson, H. J. (2020). Extreme ultraviolet lithography. SPIE Press. https://doi.org/10.1117/3.2581446

Chicago Style (17th ed.) Citation

Levinson, Harry J. Extreme Ultraviolet Lithography. Bellingham, Washington: SPIE Press, 2020. https://doi.org/10.1117/3.2581446.

MLA (9th ed.) Citation

Levinson, Harry J. Extreme Ultraviolet Lithography. SPIE Press, 2020. https://doi.org/10.1117/3.2581446.

Warning: These citations may not always be 100% accurate.