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200817s2020 waua ob 001 0 eng |
| 020 |
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|z 9781510639393
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| 020 |
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|a 9781510639409 (online)
|
| 035 |
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|a (EBZ)ebs27398495e
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| 040 |
|
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|a DLC
|b eng
|d EBZ
|
| 042 |
|
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|a pcc
|
| 050 |
0 |
0 |
|a TK7872.M3
|b L48 2020
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| 100 |
1 |
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|a Levinson, Harry J.,
|e author.
|
| 245 |
1 |
0 |
|a Extreme ultraviolet lithography
|h [electronic resource] /
|c Harry J. Levinson.
|
| 264 |
|
1 |
|a Bellingham, Washington :
|b SPIE Press,
|c [2020]
|
| 504 |
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Extreme ultraviolet lithography.
|
| 650 |
|
0 |
|a Ultraviolet radiation
|x Industrial applications.
|
| 650 |
|
0 |
|a Photolithography.
|
| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers,
|e publisher.
|
| 773 |
0 |
|
|t SPIE Digital Library - eBooks
|d SPIE - The International Society for Optical Engineering
|
| 776 |
1 |
|
|t Extreme ultraviolet lithography /
|w (DLC)2020944342
|
| 856 |
4 |
0 |
|y Access Content Online(from SPIE Digital Library - eBooks)
|u https://ezproxy.msu.edu/login?url=https://doi.org/10.1117/3.2581446
|z SPIE Digital Library - eBooks: 2020
|
