Optical and EUV lithography [electronic resource] : a modeling perspective / Andreas Erdmann.
"State-of-the-art semiconductor lithography combines the most advanced optical systems of our world with cleverly designed and highly optimized photochemical materials and processes to fabricate micro- and nanostructures that enable our modern information society. The precise fabrication and metrolo...
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| Language: | English |
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Bellingham :
SPIE--The International Society for Optical Engineering,
[2021]
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| Variant Title: |
Optical and EUV Lithography: A Modeling Perspective |
| Format: | Electronic eBook |
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