Erdmann, A. (2021). Optical and EUV lithography: A modeling perspective. SPIE--The International Society for Optical Engineering. https://doi.org/10.1117/3.2576902
Chicago Style (17th ed.) CitationErdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. Bellingham: SPIE--The International Society for Optical Engineering, 2021. https://doi.org/10.1117/3.2576902.
MLA (9th ed.) CitationErdmann, Andreas. Optical and EUV Lithography: A Modeling Perspective. SPIE--The International Society for Optical Engineering, 2021. https://doi.org/10.1117/3.2576902.
Warning: These citations may not always be 100% accurate.