Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia / Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards.
| Uniform Title: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 480. |
|---|---|
| Corporate Author: | |
| Other Authors: | |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE--the International Society for Optical Engineers,
[1984], ©1984.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 480. |
| Subjects: | |
| Genre: | |
| Physical Description: | vi, 172 pages : illustrations ; 28 cm. |
| Format: | Book |
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