SEM microcharacterization of semiconductors / edited by D. B. Holt, D. C. Joy.

Bibliographic Details
Uniform Title:	Techniques of physics ; 12.
Other Authors:	Holt, D. B. (David Basil), 1928- Holt, D. B. Joy, David C., 1943-
Language:	English
Published:	London ; San Diego : Academic Press, [1989], ©1989.
Series:	Techniques of physics ; 12.
Subjects:	Semiconductor devices.
Physical Description:	xiii, 452 pages : illustrations ; 24 cm.
Format:	Book

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