Measurement assurance for dimensional measurements on integrated-circuit photomasks / Carroll Croarkin, Ruth N. Varner.

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Bibliographic Details
Uniform Title:	NBS technical note ; 1164.
Main Author:	Croarkin, Carroll
Corporate Author:	Center for Applied Mathematics (U.S.). Statistical Engineering Division
Other Authors:	Varner, Ruth N.
Language:	English
Published:	Washington, D.C. : U.S. Department of Commerce, National Bureau of Standards : For sale by Supt. of Docs., U.S. G.P.O., 1982.
Series:	NBS technical note ; 1164.
Subjects:	Optical instruments > Calibration. Integrated circuits > Masks > Measurement.
Physical Description:	v, 44 pages : illustrations ; 28 cm.
Format:	Government Document Book

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