Surface property modification of silicon / by Steven Danyluk.

Bibliographic Details
Uniform Title:NASA contractor report ; NASA CR-173952.
Main Author: Danyluk, Steven
Corporate Authors: University of Illinois at Chicago Circle
Jet Propulsion Laboratory (U.S.)
Language:English
Published: [Washington, D.C.?] : [National Aeronautics and Space Administration], [1984]
Series:NASA contractor report ; NASA CR-173952.
Subjects:
Physical Description:1 volume : illustrations ; 28 cm.
Format: Government Document Microfilm Book

MARC

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