Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.
| Uniform Title: | Standard reference materials.
NIST special publication ; 260-114. |
|---|---|
| Main Author: | |
| Corporate Author: | |
| Other Authors: | |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Department of Commerce, National Institute of Standards and Technology,
1991.
|
| Series: | Standard reference materials.
NIST special publication ; 260-114. |
| Subjects: | |
| Physical Description: | xii, 33 pages : illustrations ; 28 cm. |
| Format: | Government Document Book |
MARC
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| 100 | 1 | |a Vezzetti, Carol F. |0 http://id.loc.gov/authorities/names/n91123186 | |
| 245 | 1 | 0 | |a Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems / |c Carol F. Vezzetti, Ruth N. Varner, James E. Potzick. |
| 260 | |a Gaithersburg, MD : |b U.S. Department of Commerce, National Institute of Standards and Technology, |c 1991. | ||
| 300 | |a xii, 33 pages : |b illustrations ; |c 28 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 490 | 1 | |a Standard reference materials | |
| 490 | 1 | |a NIST special publication ; |v 260-114 | |
| 500 | |a Distributed to depository libraries in microfiche. | ||
| 500 | |a No longer available for sale by the Supt. of Docs. | ||
| 500 | |a "Issued January 1991." | ||
| 504 | |a Includes bibliographical references (pages 11-12). | ||
| 513 | |a Final. | ||
| 650 | 0 | |a Microscopes |x Calibration |x Standards. |0 http://id.loc.gov/authorities/subjects/sh2010006966 | |
| 650 | 0 | |a Integrated circuits |x Masks |x Measurement. |0 http://id.loc.gov/authorities/subjects/sh85067122 | |
| 650 | 0 | |a Chromium |x Spectra |x Standards. |0 http://id.loc.gov/authorities/subjects/sh85025353 | |
| 700 | 1 | |a Varner, Ruth N. |0 http://id.loc.gov/authorities/names/n82157813 | |
| 700 | 1 | |a Potzick, James E. |0 http://id.loc.gov/authorities/names/n94025695 | |
| 710 | 2 | |a National Institute of Standards and Technology (U.S.) |0 http://id.loc.gov/authorities/names/n88112126 | |
| 740 | 0 | |a Bright chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems. | |
| 830 | 0 | |a Standard reference materials. |0 http://id.loc.gov/authorities/names/n42029756 | |
| 830 | 0 | |a NIST special publication ; |v 260-114. |0 http://id.loc.gov/authorities/names/n88507958 | |
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