Nanotechnology : integrated processing systems for ultra-precision and ultra-fine products / edited by Norio Taniguchi.

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Bibliographic Details
Uniform Title:Oxford science publications.
Other Authors: Taniguchi, Norio, 1912-
Published: Oxford [England] ; New York : Oxford University Press, 1996.
Series:Oxford science publications.
Physical Description:xiv, 406 pages : illustrations ; 26 cm.
Format: Book
Note:"This publication was supported by a generous donation from the Daido Life Foundation."
Call Number:T174.7 .N374 1996
Bibliography Note:Includes bibliographical references and index.
ISBN:0198562837 (h/back)