Twenty Seventh Annual IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium : [proceedings] : July 17-18, 2002, the Fairmont Hotel, San Jose, CA, USA / [co-sponsored by: SEMI, Semiconductor Equipment and Materials International, CPMT, IEEE].
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Language: | English |
Published: |
Piscataway, New Jersey :
IEEE,
[2002], ©2002.
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Physical Description: | iv, 428 pages : illustrations ; 28 cm Also available via the World Wide Web. |
Variant Title: |
International Electronics Manufacturing Technology Symposium. [Parallel title]
IEMT 2002. [Parallel title] |
Format: | Conference Proceeding Book |
Note: | "IEEE Catalog Number: 02CH37299"--verso of Title page. |
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Call Number: | TK7881 .I5 2002 |
Bibliography Note: | Includes bibliographic references. |
ISBN: | 0780373014 (softbound edition) 0780373022 (microfiche edition) |
Additional Physical Form: |
Also available via the World Wide Web. |