Semiconductor measurement technology : a collection of computer programs two-probe resistance (spreading resistance) and four-probe resistance calculations, RESPAC / John Albers and Harry L. Berkowitz.
| Uniform Title: | NIST special publication ;
400-91. |
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| Main Author: | |
| Other Authors: | |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Department of Commerce, National Institute of Standards and Technology : Washington, D.C. : For sale by Supt. of Docs., U.S. G.P.O.,
1993.
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| Series: | NIST special publication ;
400-91. |
| Subjects: | |
| Physical Description: | 139 pages : illustrations ; 28 cm. |
| Format: | Government Document Microfilm Book |
| Note: | "June 1993" Microform. |
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| Call Number: | C 13.10:400-91 |
| Bibliography Note: | "Includes bibliographical references (pages 69-71)." |
| Reproduction Note: |
Microfilm. [Washington : U.S. SUPTDOCS/GPO, 1993] 2 microfiches ; 11 x 15 cm. |