Micro-electro-mechanical systems--2006 : presented at 2006 ASME International Mechanical Engineering Congress and Exposition : November 5-10, 2006, Chicago, Illinois, USA / sponsored by the Micro-Electro-Mechanical Systems Division, ASME.

Bibliographic Details
Uniform Title:	MEMS (Series) (American Society of Mechanical Engineers) ; v. 8.
Corporate Authors:	American Society of Mechanical Engineers. Micro-Electro-Mechanical Systems Division International Mechanical Engineering Congress and Exposition
Language:	English
Published:	New York, N.Y. : ASME, [2007], ©2007.
Series:	MEMS (Series) (American Society of Mechanical Engineers) ; v. 8.
Subjects:	Microelectromechanical systems > Congresses. Fluidic devices > Congresses.
Genre:	Congresses.
Physical Description:	xxii, 715 pages : illustrations ; 28 cm.
Variant Title:	Proceedings of IMECE2006. [Spine title] IMECE2006. [Spine title]
Format:	Conference Proceeding Book

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