Frontiers of characterization and metrology for nanoelectronics : 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Albany, New York, 11 - 15 May 2009 / editors, David G. Seiler [and others] ; sponsoring organizations, National Institute of Standards & Technology [and others].

Bibliographic Details
Uniform Title:	AIP conference proceedings ; no. 1173.
Corporate Authors:	International Conference on Frontiers of Characterization and Metrology for Nanoelectronics Albany, N.Y. American Institute of Physics National Institute of Standards and Technology (U.S.)
Other Authors:	Seiler, David G.
Language:	English
Published:	Melville, N.Y. : American Institute of Physics, [2009], ©2009.
Series:	AIP conference proceedings ; no. 1173.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.
Genre:	Congresses. Congresses Software.
Physical Description:	xii, 398 pages : illustrations ; 28 cm. Also issued on CD-ROM.
Format:	Conference Proceeding Book

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