Single-material MEMS using polycyrstalline diamond / by Zongliang Cao.

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Bibliographic Details
Main Author: Cao, Zongliang
Language:English
Published: 2011.
Subjects:
Microelectromechanical systems.
Polycrystalline semiconductors.
Diamonds, Industrial.
Electronic dissertations.
Academic theses.
Genre:
Electronic dissertations.
Academic theses.
Online Access:
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Dissertation Note:
Thesis Ph. D. Michigan State University.Electrical and Computer Engineering 2011.
Physical Description:1 online resource (xiii, 172 pages) : illustrations (some color).
Format: Thesis Electronic eBook

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Online Access

Access Content Online
Connect to online resource - All users (Digital Repository @ Michigan State University)
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