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OCoLC |
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20220616161433.0 |
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m o d |
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cr ||||||||||| |
| 008 |
170221s2011 xx a obm 000 0 eng d |
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|a 9781124831893
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|a 1124831894
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|a 3468694
|b UMI
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|a Cao_grad.msu_0128D_10586
|b local
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|a (OCoLC)973325801
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|a QEMO
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|a MSU ONLINE THESIS
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| 100 |
1 |
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|a Cao, Zongliang.
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| 245 |
1 |
0 |
|a Single-material MEMS using polycyrstalline diamond /
|c by Zongliang Cao.
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| 260 |
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|c 2011.
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| 300 |
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|a 1 online resource (xiii, 172 pages) :
|b illustrations (some color).
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 500 |
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|a Electronic resource.
|
| 502 |
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|g Thesis
|b Ph. D.
|c Michigan State University.Electrical and Computer Engineering
|d 2011.
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| 504 |
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|a Includes bibliographical references.
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| 588 |
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|a Description based on online resource; title from PDF t.p. (ProQuest, viewed on April 6, 2017)
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| 650 |
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0 |
|a Microelectromechanical systems.
|0 http://id.loc.gov/authorities/subjects/sh97007351
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| 650 |
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0 |
|a Polycrystalline semiconductors.
|0 http://id.loc.gov/authorities/subjects/sh85104604
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| 650 |
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0 |
|a Diamonds, Industrial.
|0 http://id.loc.gov/authorities/subjects/sh85037572
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| 655 |
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0 |
|a Electronic dissertations.
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| 650 |
|
7 |
|a Diamonds, Industrial.
|2 fast
|0 (OCoLC)fst00892611
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| 650 |
|
7 |
|a Microelectromechanical systems.
|2 fast
|0 (OCoLC)fst01019745
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| 650 |
|
7 |
|a Polycrystalline semiconductors.
|2 fast
|0 (OCoLC)fst01070375
|
| 655 |
|
7 |
|a Academic theses.
|2 fast
|0 (OCoLC)fst01726453
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|a Michigan State University-Library of Michigan
|b Michigan State University
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