Single-material MEMS using polycyrstalline diamond / by Zongliang Cao.

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Bibliographic Details
Main Author:	Cao, Zongliang
Language:	English
Published:	2011.
Subjects:	Microelectromechanical systems. Polycrystalline semiconductors. Diamonds, Industrial. Electronic dissertations. Academic theses.
Genre:	Electronic dissertations. Academic theses.
Online Access:	Access Content Online Connect to online resource - All users (Digital Repository @ Michigan State University) Connect to online resource - All users
Dissertation Note:	Thesis Ph. D. Michigan State University.Electrical and Computer Engineering 2011.
Physical Description:	1 online resource (xiii, 172 pages) : illustrations (some color).
Format:	Thesis Electronic eBook

Single-material MEMS using polycyrstalline diamond

Authors: Cao, Zongliang

Physical Description: xiii, 172 pages : illustrations (some color).

Thesis Microfilm Book