Metrology and diagnostic techniques for nanoelectronics / edited by Zhiyong Ma, David G. Seiler.
This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a compl...
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| Language: | English |
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Singapore :
Pan Stanford Publishing,
[2016]
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| Physical Description: | xii, 1,411 pages : illustrations ; 24 cm |
| Format: | Book |
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