Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.
Uniform Title: | NIST special publication ;
1170. |
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Corporate Author: | |
Other Authors: | |
Language: | English |
Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
2014.
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Series: | NIST special publication ;
1170. |
Subjects: | |
Online Access: | |
Physical Description: | 1 online resource (315 pages) : illustrations (black and white). |
Format: | Government Document Electronic eBook |
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